Check out the Airgard World News Video
	Cyclone XL[5,000SLM Capacity] New High Capacity, High Efficiency Point-of-Use Wet Scrubber   Zero scrubber related process tool downtime. Scheduled maintenance intervals are 4-6 months and can be performed during process tool PMs. Highly efficient gas scrubbing with specialized gas inlet devices that minimize restrictions. Automated gas inlet plunger removes restrictions without process interruption. Highly efficient removal of water soluble gases such as HCl, HF, HBr, NH3, F2, BCl3, Chlorosilanes (SiHCl3, SiH2Cl2, SiCl4) and Flourosilanes (SiF4). High efficiency removal of less soluble gasses such as NH3, Cl2, H2S, H2Se is achieved with optional pH control system. Reduces most harmful gas emissions to less than 1 part per million in high gas flow rates of up to 1,000SLM. Lowest fresh water consumption in the industry - up to 50% less. Small footprint, 24 ½” X 32 ½”. No foaming and no sediment. PLC based scrubber control box automates gas inlet plunger to reactor functions and reports scrubber status.